[A-4-4] Improvement of channel mobility in SOS/MOSFETs by laser annealing

Y. Kobayashi、T. Ikeda、M. Nakamura、T. Suzuki (1.Hitachi Research Laboratory., Hitachi Ltd.)

1981 Conference on Solid State Devices |PDF ダウンロード

[A-4-5] Formation of an epitaxial Si/insulator/Si structure by vacuum deposition of CaF2 and Si

T. Asano、H. Ishiwara (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

1981 Conference on Solid State Devices |PDF ダウンロード

[A-4-6] Laser-Induced Lateral, Vertically-Seeded Epitaxial Regrowth of Deposited Si Films over Various SiO2 Patterns

M. Tamura、M. Ohkura、T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

1981 Conference on Solid State Devices |PDF ダウンロード

[A-4-7] Process Characterization of MOS devices by Scanning Electron Microscopy with 0.5-1 KV electrons

N. Hashimoto、H. Todokoro、S. Fukuhara、K. Senoo (1.Central Research Laboratory, Hitachi Ltd.)

1981 Conference on Solid State Devices |PDF ダウンロード

[A-4-8] Trapped Ar Induced Deformation of Magnetron Sputtered Al Film Overlaid with Plasma SiN Film

H. Harada、H. Yakushiji、T. Nishioka、H. Kotani、Y. Hirata (1.LSI Research and Development Laboratory, Mitsubishi Electric Corporation Computer Development Laboratories Limited)

1981 Conference on Solid State Devices |PDF ダウンロード

[A-4-9] Novel Low Temperature (＜300℃) Annealing of Amorphous Si by Scanned High Energy (～2.5 MeV) Heavy Ion Beam

Jyoji Nakata、Kenji Kajiyama (1.Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation)

1981 Conference on Solid State Devices |PDF ダウンロード

[B-3-1] Josephson Latch Decoder

I. Hanyu、H. Suzuki、S. Hasuo、T. Yamaoka (1.Fujitsu Ltd.)

1981 Conference on Solid State Devices |PDF ダウンロード

[B-3-2] JOSEPHSON TECHNOLOGY -- A TECHNOLOGY FOR HIGH PERFORMANCE COMPUTING SYSTEMS

Juri Matisoo (1.IBM Thomas J. Watson Research Center)

1981 Conference on Solid State Devices |PDF ダウンロード

[B-3-3] New Materials for Josephson Junction Devices

T. Inamura、T. Murakami、T. Inukai、Y. Enomoto、M. Suzuki (1.Ibaraki Electrical Communication Laboratory, N.T.T.)

1981 Conference on Solid State Devices |PDF ダウンロード

[B-3-4] NbN,Nb Double-Layered Base-Electrode Josephson Junctions

Shin KOSAKA、Kazuyoshi KOJIMA、Fujitoshi SHINOKI、Akira SHOJI、Hisao HAYAKAWA (1.Electrotechnical Laboratory)

1981 Conference on Solid State Devices |PDF ダウンロード