[A-3-2] Recent Advances in Photoluminescence Analysis of Si:Application to Epitaxial Layer and Nitrogen in Si

Michio Tajima (1.Electrotechnical Laboratory)

1981 Conference on Solid State Devices |PDF Download

[A-3-3] Deep Levels Induced in Annealed CZ Silicon

Kousuke IKEDA, Hidetoshi TAKAOKA (1.Musashino Electrical Communication Laboratory, NTT)

1981 Conference on Solid State Devices |PDF Download

[A-3-4] A New Method of Characterizing the In-depth Profile of Thermally Induced Defects in CZ Si

Hiroshi NAKAYAMA, Johji KATSURA, Taneo NISHINO, Yoshihiro HAMAKAWA (1.Faculty of Engineering Science, Osaka University)

1981 Conference on Solid State Devices |PDF Download

[A-3-5] Dry Development of Resist Patterns in Submicron Lithography

M. Tsuda (1.Laboratory of Physical Chemistry, Pharmaceutical Sciences, Chiba University)

1981 Conference on Solid State Devices |PDF Download

[A-3-6] Chemical and Physical Roles of Individual Reactive Ions in Si Dry Etching

S. Tachi, K. Miyake, T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

1981 Conference on Solid State Devices |PDF Download

[A-3-7] A Novel Technology for Self-Aligned Contact Formation

M. Sakamoto, M. Saito, K. Hamano (1.Nippon Electric Co., Ltd.)

1981 Conference on Solid State Devices |PDF Download

[A-3-8] Ammonia annealed SiO2 films for thin gate insulator

I. KATO, T. ITO, S. INOUE, T. NAKAMURA, H. ISHIKAWA (1.FUJITSU LABORATORIES LTD.)

1981 Conference on Solid State Devices |PDF Download

[A-4-1] MBE-Grown GaAs/N-AlGaAs Heterostructures and Their Application to High Electron Mobility Transistors

Satoshi Hiyamizu, Takashi Mimura (1.Fujitsu Laboratories Ltd.)

1981 Conference on Solid State Devices |PDF Download

[A-4-2] Recrystallization of Silicon Film on Nitride/Oxide double Insulating Structure by CW Laser Irradiation

T. Nishimura, H. Sakurai, S. Nagao, T. Isu, Y. Akasaka, N. Tsubouchi (1.LSI Development Laboratory, Mitsubishi Electric Corporation, 2.Central Research Laboratory, Mitsubishi Electric Corporation)

1981 Conference on Solid State Devices |PDF Download

[A-4-3] IMPROVEMENT OF SOS DEVICE PERFORMANCE BY SOLID-PHASE EPITAXY

Toshio YOSHII, Shinji TAGUCHI, Tomoyasu INOUE, Hiroyuki TANGO (1.Toshiba R and D Center, Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)

1981 Conference on Solid State Devices |PDF Download