[PD3-6] Fabrications and Bonding Strengths of Bonded Silicon-Quartz Wafers

Takao ABE、Atsuo UCHIYAMA、Katsuo YOSHIZAWA、Yasuyuki NAKAZATO (1.Shin-Etsu Handotai and、2.Nagano Denshi)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD3-7] High-Sensitivity and High-Resolution Contact Hole Patterning Enhanced by an Optimized Developer

H. Shimada、S. Shimomura、K. Hirose、M. Onodera、T. Ohmi (1.Department of Electronics, Faculty of Engineering, TOHOKU University)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD3-8] Sub-50 nm High Aspect-Ratio Silicon Pillars, Ridges and Trenches Fabricated Using Ultra-High E-Beam Lithography and RIE

P. B. Fischer、S. Y. Chou (1.University of Minnesota Department of Electrical Engineering)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD3-9] Sensitivities of Laser/Microwave- and Conventional-DLTS for Defects in CZ Silicon

K. Katayama、A. Agarwal、Z. J. Radzimski、F. Shimura (1.North Carolina State University, Department of Materials Science & Engineering)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD3-10] Fabrication of a SiGe-Channel MOSFET Containing High Ge Fraction Layer by Low-Pressure Chemical Vapor Deposition

Kinya GOTO、Junichi MUROTA、Takahiro MAEDA、Reiner SCHUTZ、Kiyohito AIZAWA、Roland KIRCHER、Kuniyoshi YOKOO、Shoichi ONO (1.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD3-L11] Characterization of GeSi/Si Layer Structure by CBED

G. SHAO、Z. YANG、B. L. WEISS (1.Department of Materials Science and Engineering Department of Electronic and Electrical Engineering University of Surrey)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD4-1] Lower-Submicron Patterning Process for BiSrCaCuO High-Tc Superconducting Thin Films

Shuji FUJIWARA、Ryokan YUASA、Hiroaki FURUKAWA、Masao NAKAO、Shigeo SUZUKI (1.SANYO Tsukuba Research Center)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD4-2] Fabrication of High Quality Perovskite Oxide Films by Lateral Epitaxy Verified with RHEED Oscillation

Hiroyuki OHKUBO、Naoki KANDA、Mamoru YOSHIMOTO、Hideomi KOINUMA (1.Research Laboratory of Engineering Materials, Tokyo Institute of Technology)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD4-3] In-situ Optical Monitoring of Oxide Superconductor Growth for Layer-by-Layer Chemical Vapor Deposition

Hideaki Zama、Kenji Sakai、Shunri Oda (1.Department of Physical Electronics, Tokyo Institute of Technology)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PD4-4] Superconductivity and Magnetism of Y1-xPrxBa2Cu4O8 Prepared by Nitride Pyrolysis Method

T. H. Meen、Y. C. Chen、H. D. Yang (1.Institute of Electrical Engineering and Department of Physics, National Sun Yat-Sen University)

1992 International Conference on Solid State Devices and Materials |PDF ダウンロード