[A05-4pm] 05. Physical Chemistry -Chemical Kinetics and Dynamics-

[A05-4pm-03] Fabrication and Electrical Characterization of Naked Superatom Assembled Films based on High Intensity Nanocluster Source and Soft Landing

^○Takaho Yokoyama¹, Tatsuya Chiba¹, Naoyuki Hirata¹, Masahiro Shibuta¹, Atsushi Nakajima¹ (1. Keio University)

[Lang.] Japanese

Keywords:superatom, nanocluster, soft landing, sputtering, silicon