Lasertec Corporation, founded in 1960, has grown into a world leading innovator of inspection and metrology equipment serving the global semiconductor and related industries. Tools being highlighted for compound semiconductor are SICA88, and GALOIS which are  confocal/DIC and photoluminescence based inspection/analysis tool not only capable of detecting all the critical defects at high sensitivity but also automatically classify killer defects optimizing to enable the highest yielding devices for customers who deal with SiC, GaN and other transparent substrates. Recently Laser microscope “HYBRID+”, a multi-function desktop tool for wafer defect inspection, CD measurement and film thickness measurement, and a higher throughput inspection tool called “ AI²”  also have got many inquiries from various  compound semiconductor customers for R&D and initial HVM.