19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

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Mo-2: Si & IV group

Si & IV group

Mo-2: Si & IV group

Mon. Aug 29, 2022 5:15 PM - 6:30 PM DRIP ONLINE CONFERENCE

Chair:Deren Yang, Atsushi Ogura

5:15 PM - 5:45 PM

[Mo2-1/Inv] Si and SiGe Epitaxial Growth in view of Nanosheet CMOS Devices and 3D Sequential Integration

*Roger Loo1, Andriy Hikavyy1, Clement Porret1, Erik Rosseel1, Gianluca Rengo1,2,3, André Vantomme2, Robert Langer1 (1. Imec, 2. Quantum Solid State Physics, KU Leuven, 3. Fonds Wetenschappelijk Onderzoek (FWO) - Vlaanderen)