We-2: MI & Characterization

△ [We2-5] 2D and 3D Investigation of Dislocation Dynamics in Semiconductor Wafers Studied by X-ray Diffraction Imaging Techniques

*Merve Pinar Kabukcuoglu^1,2, Andreas Danilewsky², Elias Hamann¹, Simon Bode^1,3, Simon Haaga^1,2, Tilo Baumbach^1,3, Daniel Hänschke¹ (1. Institute for Photon Science and Synchrotron Radiation (IPS) Karlsruhe Institute of Technology (KIT), 2. Crystallography, University of Freiburg, 3. Laboratory for Applications of Synchrotron Radiation (LAS), Karlsruhe Institute of Technology (KIT))