19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

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We-P: Poster-2

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We-P: Poster-2


✳︎Participants can view e-posters and short presentation videos anytime during Aug. 29 - Sep. 8 on the DRIP XIX website.

Wed. Aug 31, 2022 6:45 PM - 8:00 PM DRIP-Poster-ZOOM

[WeP-07] Evaluation of Lattice-Spacing of Si and SiGe by NBD using conventional TEM

*Junji Yamanaka1, Takuya Oguni1, Joji Furuya1, Kosuke O. Hara1, Keisuke Arimoto1 (1. University of Yamanashi)