19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

講演情報

印刷

We-P: Poster-2

General

We-P: Poster-2


✳︎Participants can view e-posters and short presentation videos anytime during Aug. 29 - Sep. 8 on the DRIP XIX website.

2022年8月31日(水) 18:45 〜 20:00 DRIP-Poster-ZOOM

[WeP-12] Estimation of defect depth in ion-implanted β-Ga2O3 by plan-view cathodoluminescence

*Ryuichi Sugie1, Tomoyuki Uchida1 (1. Toray Research Center Inc.)