19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

Presentation information

Print

We-P: Poster-2

General

We-P: Poster-2


✳︎Participants can view e-posters and short presentation videos anytime during Aug. 29 - Sep. 8 on the DRIP XIX website.

Wed. Aug 31, 2022 6:45 PM - 8:00 PM DRIP-Poster-ZOOM

[WeP-12] Estimation of defect depth in ion-implanted β-Ga2O3 by plan-view cathodoluminescence

*Ryuichi Sugie1, Tomoyuki Uchida1 (1. Toray Research Center Inc.)