19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

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We-P: Poster-2

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We-P: Poster-2


✳︎Participants can view e-posters and short presentation videos anytime during Aug. 29 - Sep. 8 on the DRIP XIX website.

Wed. Aug 31, 2022 6:45 PM - 8:00 PM DRIP-Poster-ZOOM

△ [WeP-14] Development of a high-resolution nuclear emulsion plate for X-ray topography observation of large-size semiconductor wafers

*Shunta Harada1, Kunihiro Morishima1, Nobuko Kitagawa1, Atsushi Tanaka1, Kenji Hanada2, Kotaro Ishiji3 (1. Nagoya University, 2. Aichi Synchrtron Radiation Center, 3. Kyushu Synchrotron Light Research Center)