19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

講演情報

Th-1: SiC-1

SiC

Th-1: SiC-1

2022年9月1日(木) 15:00 〜 16:15 DRIP ONLINE CONFERENCE

Chair:Hidekazu Tsuchida、Peder Bergman

16:00 〜 16:15

[Th1-4] Experimental study on photoelastic coefficient and its wavelength dispersion for quantitative imaging of residual strain in commercial SiC substrates

*Masayuki Fukuzawa1, Nobuya Kudo1 (1. Kyoto Institute of Technology)