19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

Presentation information

Th-1: SiC-1

SiC

Th-1: SiC-1

Thu. Sep 1, 2022 3:00 PM - 4:15 PM DRIP ONLINE CONFERENCE

Chair:Hidekazu Tsuchida, Junji Senzaki

4:00 PM - 4:15 PM

[Th1-4] Experimental study on photoelastic coefficient and its wavelength dispersion for quantitative imaging of residual strain in commercial SiC substrates

*Masayuki Fukuzawa1, Nobuya Kudo1 (1. Kyoto Institute of Technology)