19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

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Th-2: SiC-2

SiC

Th-2: SiC-2

Thu. Sep 1, 2022 4:45 PM - 6:15 PM DRIP ONLINE CONFERENCE

Chair:Michael Dudley, Yukari Ishikawa

4:45 PM - 5:15 PM

[Th2-1/Inv] Homoepitaxial growth and defect characterization of 4H-SiC

*Birgit Kallinger1, Christian Kranert1, Zara Mercedes Schade1, Mathias Rommel1, Patrick Berwian1 (1. Fraunhofer IISB)