19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

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Th-2: SiC-2

SiC

Th-2: SiC-2

Thu. Sep 1, 2022 4:45 PM - 6:15 PM DRIP ONLINE CONFERENCE

Chair:Michael Dudley, Yukari Ishikawa

5:30 PM - 5:45 PM

[Th2-3] Strain Evolution in N and Al Ion Implantation Doping in 4H-SiC Epilayers

*Xuan Zhang1, Jiaxu Gao2, Liguo Zhang1, Xiang Kan1, Tao Ju1, Baoshun Zhang1, Dan Fang2 (1. Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, 2. Changchun University of Science and Technology)