The 39th International Conference of Photopolymer Science and Technology

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EUV Lithography

[2A501-04] EUV Lithography I

Wed. Jun 29, 2022 9:00 AM - 10:40 AM EUV Lithography (A5)

Chairman:Takeo Watanabe(University of Hyogo), Shinji Yamakawa(University of Hyogo)

9:00 AM - 9:30 AM

[2A501] Advanced Photoresists for 0.55 NA EUV Lithography: Status, Progress, and Challenges [Invited]

*Florian Gstrein1,2 (1. Intel, 2. Components Research)