The 39th International Conference of Photopolymer Science and Technology

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EUV Lithography

[2A505-07] EUV Lithography II

Wed. Jun 29, 2022 10:40 AM - 12:00 PM EUV Lithography (A5)

Chairman:Taku Hirayama(HOYA Corp.), Hiroaki Oizumi(GIGAPHOTON Inc.)

11:30 AM - 12:00 PM

[2A507] Synthesis and resist sensitive property of iodine-containing materials using extreme ultraviolet (EUV) exposure tool [Invited]

Hiroto Kudo1, *Yutaro Iwashige1, Kazumasa Okamoto2, Takahiro Kozawa2 (1. Kansai Univ., 2. Osaka Univ.)