The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A505-07] EUV Lithography II

2022年6月29日(水) 10:40 〜 12:00 EUV Lithography (A5)

Chairman:Taku Hirayama(HOYA Corp.), Hiroaki Oizumi(GIGAPHOTON Inc.)

11:30 〜 12:00

[2A507] Synthesis and resist sensitive property of iodine-containing materials using extreme ultraviolet (EUV) exposure tool [Invited]

Hiroto Kudo1, *Yutaro Iwashige1, Kazumasa Okamoto2, Takahiro Kozawa2 (1. Kansai Univ., 2. Osaka Univ.)