The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

Computational / Analytical Approach for Lithography Processes

[A4] Computational / Analytical Approach for Lithography processes

2022年6月30日(木) 09:00 〜 11:30 Computational / Analytical Approach for Lithography Processes (A4)

Chairman:Tomoki Nagai(JSR Corporation), Takahiro Kozawa(Osaka University)

10:00 〜 10:30

[3A403] Atomistic Dynamics and Mechanism of SiO2 Plasma Etching Processes: Tight-Binding Quantum Chemical Molecular Dynamics Simulations [invited]

*Momoji Kubo1 (1. Institute for Materials Research, Tohoku University)