The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Poster presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[18p-P9-1~10] 13.3 Insulator technology

Wed. Sep 18, 2013 1:30 PM - 3:30 PM P9 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[18p-P9-6] DLTS Evaluation of Near-Interface Traps in GeNx/Ge Structures Fabricated by ECR-Plasma Techniques Ⅱ

○Hidehumi Narita1, Takuro Iwasaki1, Yukio Fukuda2, Yohei Otani2, Toshiro Ono1, Hiroshi Okamoto1 (Hirosaki Univ.1, Tokyo Univ. of Sci.2)

Keywords:Ge-MIS,DLTS