[19a-P5-1~14] 13.5 Si process technology

[19a-P5-9] Liquid-phase deposition of thin Si, Ge, and SiGe films based on ballistic electron injection

^○Mitsuki Ito¹, Ryutaro Suda¹, Mamiko Yagi¹, Akira Kojima¹, Mentek Romain¹, Jun-ichi Shirakashi¹, Nobuyoshi Koshida¹ (Graduate School of Eng., Tokyo Univ. of Agri. & Technol.¹)

Keywords:電子源,薄膜堆積,還元