The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[19p-B4-1~21] 13.5 Si process technology

Thu. Sep 19, 2013 1:30 PM - 7:00 PM B4 (TC2 1F-106)

1:45 PM - 2:00 PM

[19p-B4-2] Characteristic Evaluation of fine TFTs Crystallized by Micro Thermal Plasma Jet Irradiation

○Seiji Morisaki1, Shohei Hayashi1, Takahiro Kamikura1, Shogo Yamamoto1, Muneki Akazawa1, Kohei Sakaike1, Seiichiro Higashi1 (Graduate School of Advanced Sciences of Matter, Hiroshima University1)

Keywords:TFT,熱プラズマジェット,CMOS