[19p-B4-1~21] 13.5 Si process technology

[19p-B4-9] Luminescence from SiO2 by Helium Ion Microscope (HIM) without any Damage Characterized by TEM-EELS

^○Shinichi Ogawa¹, Tomohiko Iijima¹, Ryuichi Sugie², Naohiko Kawasaki², Yuji Otsuka² (AIST¹, Toray Res. Ctr.²)

Keywords:ルミネッセンス,ヘリウムイオン顕微鏡,ダメージ