The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[28a-G2-1~12] 13.3 Insulator technology

Thu. Mar 28, 2013 10:00 AM - 1:15 PM G2 (B5 1F-2102)

[28a-G2-9] Electrical characteristics of Anatase-TiO2 films by low temperature fabrication

Masayuki Kimura1, ○Toshihide Nabatame2, Hiroyuki Yamada1, Akihiko Ohi2, Toshihiro Narushima2, Toyohiro Chikyow2, Tomoji Ohishi1 (Shibaura Institute of Tech.1, NIMS2)

Keywords:TiO2、アナターゼ、フラットバンド電圧