[28p-G6-1~17] 13.5 Si process technology

[28p-G6-14] Improvement in Characteristic Variability of TFTs Using Grain Growth Control by Micro Thermal Plasma Jet Irradiation to a-Si Strips and CMOS Circuit Operation at Supply Voltage of 5V

^○Seiji Morisaki¹, Shohei Hayashi¹, Yuji Fujita¹, Seiichiro Higashi¹ (Hiroshima univ.¹)

Keywords:TFT、熱プラズマジェット