The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[29p-A3-1~6] 16.2 Processing technologies and devices

Fri. Mar 29, 2013 1:30 PM - 3:00 PM A3 (K1 2F-201)

[29p-A3-5] Formation of a hydrogenated amorphous silicon film by a slit-coating method

Hideyuki Takagishi1,3, Yasuo Matsuki2,4, Takashi Masuda1,4, Zhongrong Shen1,3, Lam Pham Tien1,3, Keisuke Ohdaira1,3, Tatsuya Shimoda1,3,4 (JAIST1, JSR2, JST ALCA3, JST ERATO4)

Keywords:アモルファスシリコン薄膜、スリットコート法、液体シリコン材料