[29p-B2-1~18] 7.6 Ion beams

[29p-B2-7] Depth profiling of polyester/melamine resin by secondary ion mass spectrometry with Ar gas cluster ion beam

^○Suguru Nishinomiya¹, Kunihiko Toshin¹, Kensuke Iuchi², Naoki Se², Kousuke Moritani², Kozo Mochiji² (Nippon Steel & Sumitomo Metal Corporation¹, University of Hyogo²)

Keywords:SIMS、ガスクラスターイオンビーム、塗膜