The 60th JSAP Spring Meeting,2013

Presentation information

Print

Regular sessions(Poster presentation)

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[29p-PB1-1~20] 13.3 Insulator technology

Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB1 (2nd gymnasium)

[29p-PB1-8] Variation of electrical properties of polycrystalline HfO2 film due to oxidation and reduction annealing

○Hisanori Momma1, Ryu Hasunuma1, Kikuo Yamabe1 (Univ. of Tsukuba1)

Keywords:多結晶HfO2