[29p-PB1-9] Oxidation annealing effect on two dimensional leakage current distribution at the same spot of polycrystalline HfO2
Keywords:HfO2、high-k、結晶
Regular sessions(Poster presentation)
13. Semiconductors A (Silicon) » 13.3 Insulator technology
Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB1 (2nd gymnasium)
Keywords:HfO2、high-k、結晶