Effects of thinning condensation UTB GOI films by additional thermal oxidation on GOI Characteristics

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

Thu. Sep 18, 2014 1:30 PM - 5:15 PM A16 (E307)

4:15 PM - 4:30 PM

^○WuKang Kim^1,2, Shinichi Takagi^1,2, Mitsuru Takenaka^1,2 (The University of Tokyo¹, JST-CREST²)

Keywords:Ge Condensation,UTB GOI MOSFET