Ga2O3 and Al2O3 hybrid passivation for improving of HfO2/InGaAs MIS characteristics

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

Tue. Mar 18, 2014 1:30 PM - 5:30 PM D8 (D215)

4:45 PM - 5:00 PM

^○Wipakorn Jevasuwan¹, Tatsuro Maeda¹, Noriyuki Miyata¹, Minuro Oda¹, Toshifumi Irisawa¹, Tsutomu Tezuka¹, Tetsuji Yasuda¹ (AIST¹)

Keywords:Insulator,III-V