Suspended Amorphous Indium-Gallium-Zinc Oxide Thin-Film Transistors Fabricated by Bulk Micromachining Techniques

Shinnosuke Iwamatsu

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[18p-E10-1~20] Nanocarbon Technology

Tue. Mar 18, 2014 1:15 PM - 6:30 PM E10 (E204)

6:00 PM - 6:15 PM

[18p-E10-19] Suspended Amorphous Indium-Gallium-Zinc Oxide Thin-Film Transistors Fabricated by Bulk Micromachining Techniques

^○Shinnosuke Iwamatsu¹, Kazushige Takechi², Yutaka Abe¹, Toru Yahagi¹, Hiroshi Tanabe², Seiya Kobayashi¹ (Yamagata Res. Inst. Technol.¹, NLT Technologies²)

Keywords:a-InGaZnO,MEMS

« Previous in this session
Next in this session »

▲