The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[18p-E10-1~20] Nanocarbon Technology

Tue. Mar 18, 2014 1:15 PM - 6:30 PM E10 (E204)

6:00 PM - 6:15 PM

[18p-E10-19] Suspended Amorphous Indium-Gallium-Zinc Oxide Thin-Film Transistors Fabricated by Bulk Micromachining Techniques

Shinnosuke Iwamatsu1, Kazushige Takechi2, Yutaka Abe1, Toru Yahagi1, Hiroshi Tanabe2, Seiya Kobayashi1 (Yamagata Res. Inst. Technol.1, NLT Technologies2)

Keywords:a-InGaZnO,MEMS