6:00 PM - 6:15 PM
[18p-E10-19] Suspended Amorphous Indium-Gallium-Zinc Oxide Thin-Film Transistors Fabricated by Bulk Micromachining Techniques
Keywords:a-InGaZnO,MEMS
Oral presentation
Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology
Tue. Mar 18, 2014 1:15 PM - 6:30 PM E10 (E204)
6:00 PM - 6:15 PM
Keywords:a-InGaZnO,MEMS