[18p-E10-1~20] Nanocarbon Technology

[18p-E10-9] Investigation of Electron Beam Induced Effects on Nano Crystalline Oxide Semiconductor Deposited by Sputtering (1)

^○Michiko Yano¹, Erika Takahashi¹, Koji Dairiki¹, Masahiro Takahashi¹, Takuya Hirohashi¹, shunpei Yamazaki¹ (Semiconductor Energy Laboratory Co., Ltd.¹)

Keywords:酸化物半導体,ナノ結晶,極微電子線回折