Investigation of Electron Beam Induced Effects on Nano Crystalline Oxide Semiconductor Deposited by Sputtering (2)

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Tue. Mar 18, 2014 1:15 PM - 6:30 PM E10 (E204)

3:30 PM - 3:45 PM

^○Koji Dairiki¹, Masashi Oota¹, Masahiro Takahashi¹, Takuya Hirohashi¹, Shunpei Yamazaki¹ (Semiconductor Energy Laboratory Co., Ltd.¹)

Keywords:酸化物半導体,ナノ結晶,極微電子線回折