The 61st JSAP Spring Meeting, 2014

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15. Crystal Engineering » 15.4 III-V-group nitride crystals

[18p-E13-1~18] 15.4 III-V-group nitride crystals

Tue. Mar 18, 2014 1:00 PM - 6:15 PM E13 (E301)

4:00 PM - 4:15 PM

△ [18p-E13-11] Thermal cleaning of free-standing GaN substrates

○（M1）Shunsuke Okada1, Hideto Miyake1, Kazumasa Hiramatsu1, Reina Miyagawa2, Osamu Eryu2 (Mie Univ.1, Nagoya Inst. Tech.2)

Keywords:MOVPE,GaN,Cleaning