TAKUYA KITANO

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:30 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[15a-B7-1~14] 8.1 Plasma production and control

9:15 AM - 9:30 AM

[15a-B7-2] Time Resolved Optical Emission Spectroscopic Measurements in Microwave Excited Water Plasma during Ashing Process

〇TAKUYA KITANO¹, HIROAKI SUZUKI¹, ARUFUA SHIOTA¹, TATSUO ISHIJIMA¹, YASUNORI TANAKA¹, YOSHIHIKO UESUGI¹ (1.Kanazawa Univ.)

Fri. Sep 16, 2016 1:45 PM - 5:00 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16p-B10-1~12] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

3:00 PM - 3:15 PM

△ [16p-B10-6] Investigations of the Mechanism of Photoresist Removal in Water Plasma Ashing

〇TAKUYA KITANO¹, HIROAKI SUZUKI¹, ARUFUA SHIOTA¹, TATSUO ISHIJIMA¹, YASUNORI TANAKA¹, YOSHIHIKO UESUGI¹, SOMMAWAN KHUMPUANG^2,3, SHIRO HARA^2,3 (1.Kanazawa Univ., 2.MINIMAL, 3.AIST)

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