Development of Dry etching process for high-performance Piezoelectric MEMS Device

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Tue. Sep 13, 2016 10:00 AM - 11:45 AM A23 (201B)

10:45 AM - 11:00 AM

〇Tadashi Yamamoto¹, Hiroki Kobayashi¹, Takehito Jimbo¹, Ryuuichirou Kamimura¹ (1.ULVAC)

Keywords:etching, piezoelectric