The 63rd JSAP Spring Meeting, 2016

Presentation information

Poster presentation

13 Semiconductors » 13.3 Insulator technology

[19p-P3-1~7] 13.3 Insulator technology

Sat. Mar 19, 2016 1:30 PM - 3:30 PM P3 (Gymnasium)

1:30 PM - 3:30 PM

[19p-P3-3] Characterization of sol-gel derived Nb doped ZrO2 thin film

Joonam Kim1, Eisuke Tokumitu1 (1.JAIST)

Keywords:high-k,Niobium (Nb)