[19p-P3-1~7] 13.3 絶縁膜技術

▲ [19p-P3-3] Characterization of sol-gel derived Nb doped ZrO₂ thin film

〇金 胄男¹、Tokumitu Eisuke¹ (1.JAIST)

キーワード：high-k,Niobium (Nb)