2:00 PM - 2:15 PM
[22p-W541-5] Operation of 16nm-InGaAs channel multi-gate MOSFETs with MOVPE regrown source/drain
Keywords:High mobility channel,MOVPE,multi-gate
Oral presentation
13 Semiconductors » 13.8 Compound and power electron devices and process technology
Tue. Mar 22, 2016 1:00 PM - 3:00 PM W541 (W5)
Naoteru Shigekawa(Osaka City Univ.)
2:00 PM - 2:15 PM
Keywords:High mobility channel,MOVPE,multi-gate