11:00 AM - 11:15 AM
[17a-E206-9] Effect of annealing on threading-dislocation densities of suputter-epitaxial Ge film on Si
Keywords:suputter, Gerumanium, epitaxy
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[17a-E206-1~14] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Fri. Mar 17, 2017 9:00 AM - 12:45 PM E206 (E206)
Kuniyuki Kakushima(Titech), Tatsuya Okada(Univ. of the Ryukyus)