Tomoaki Kageyama

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:15 AM - 12:15 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:45 AM - 12:00 PM

[20a-C101-10] Fabrication of pH-ISFETs with SiO₂ Sensing Layer by Using Minimal Fab

〇Tomoaki Kageyama^1,3, Kazuhiro Koga², Sommawan Khumpuang^3,2, Shiro Hara^3,2, Sang-Seok Lee¹ (1.Tottori Univ., 2.MINIMAL, 3.AIST)