9:15 AM - 9:30 AM
〇Kodai Tanaka1, Etsuo Maeda1, Shin-ichi Warisawa1,2, Reo Kometani1,2 (1.Grad. Sch. of Eng., Univ. of Tokyo, 2.Grad. Sch. of Front. Sci., Univ. of Tokyo)
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)
Kuniyuki Kakushima(Titech)
△:奨励賞エントリー
▲:英語発表
▼:奨励賞エントリーかつ英語発表
空欄:どちらもなし
9:15 AM - 9:30 AM
〇Kodai Tanaka1, Etsuo Maeda1, Shin-ichi Warisawa1,2, Reo Kometani1,2 (1.Grad. Sch. of Eng., Univ. of Tokyo, 2.Grad. Sch. of Front. Sci., Univ. of Tokyo)
9:30 AM - 9:45 AM
〇(B)Sawako Tanaka1, Syuhei Onishi1, Makoto Ishida1, Kazuaki Sawada1, Hiromu Ishii1, Katsuyuki Machida2, Kazuya Masu2, Yasuhiko Nikaido3, Mitsumasa Saito3, Shinichi Yoshida4 (1.Toyohashi Univ. of Technology, 2.Tokyo Inst. of Technology, 3.Univ. of Occupational and Environmental Health, 4.Fukuoka Megumi Hospital)
9:45 AM - 10:00 AM
〇hayato kumagai1, isao takahashi2, shinji takeoka2,3, kazuaki sawada1, toshinori fujie2,3, kazuhiro takahashi1,3 (1.Toyohashi Univ., 2.Waseda Univ., 3.JST PRESTO)
10:00 AM - 10:15 AM
〇Hiroto Kobayashi1, Ryo Yokogawa1,2, Takahiro Suzuki1, Yoichiro Numazawa1, Atsushi Ogura1, Shin-ichi Nishizawa3, Takuya Saraya4, Kazuo Ito4, Toshihiko Takakura4, Shin-ichi Suzuki4, Munetoshi Fukui4, Kiyoshi Takeuchi4, Toshiro Hiramoto4 (1.Meiji Univ., 2.JSPS Research Fellow DC, 3.Kyushu Univ., 4.Tokyo Univ.)
10:15 AM - 10:30 AM
〇Takashi Matsukawa1, Takahiro Mori1, Yoshihiro Sawada2, Yohei Kinoshita2, Yongxun Liu1, Meishoku Masahara1 (1.AIST, 2.Tokyo Ohka Kogyo)
10:30 AM - 10:45 AM
〇Tomokazu Nagao1, Yutaka Inouchi1, Junichi Tatemichi1, Keisuke Yasuta2, Takuma Uehara2, Masahiko Hasumi2, Toshiyuki Sameshima2 (1.NISSIN ION EQUIPMENT, 2.TUAT)
10:45 AM - 11:00 AM
〇Keisuke Yasuta1, Takuma Uehara1, Masahiko Hasumi1, Tomokazu Nagao2, Yutaka Inouchi2, Toshiyuki Sameshima1 (1.TUAT, 2.NISSIN ION EQUIPMENT Co.)
11:00 AM - 11:15 AM
〇Shinji Nakada1, Masaki Yamamoto1, Sho Irie1, Yusuke Omata1, Takashi Aoki1, Toshiyuki Sameshima2, Tomohisa Mizuno1 (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)
11:15 AM - 11:30 AM
Sho Irie1, 〇Masaki Yamamoto1, Sinji Nakada1, Yusuke Omata1, Takashi Aoki1, Toshiyuki Sameshima2, Tomohisa Mizuno1 (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)
11:30 AM - 11:45 AM
〇Rikito Kanazawa1, Yusuke Omata1, Yusuke Iguchi1, Takashi Aoki1, Toshiyuki Sameshima2, Tomohisa Mizuno1 (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)
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