10:45 AM - 11:00 AM
[17a-C101-6] Effect of channel impurity doping on poly-Si TFTs with Multi-Line-Beam CLC
Keywords:semiconductor, TFT
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)
Takashi Noguchi(Univ. of the Ryukyus)