The 65h JSAP Spring Meeting, 2018

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-C101-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)

Kuniyuki Kakushima(Titech)

9:30 AM - 9:45 AM

[19a-C101-2] Chemical Kinetic Analysis for Temporal Variation of Fluorescence from Legionella

〇(B)Sawako Tanaka1, Syuhei Onishi1, Makoto Ishida1, Kazuaki Sawada1, Hiromu Ishii1, Katsuyuki Machida2, Kazuya Masu2, Yasuhiko Nikaido3, Mitsumasa Saito3, Shinichi Yoshida4 (1.Toyohashi Univ. of Technology, 2.Tokyo Inst. of Technology, 3.Univ. of Occupational and Environmental Health, 4.Fukuoka Megumi Hospital)

Keywords:bacterium, Legionella, Integrated MEMS