[18p-C309-1~13] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18p-C309-3] Development of high-speed removal technology for surface coating on long objects
by MVP method using thermionic emission filament

〇(M2)Masaya Furuta¹, Kosaka Hiroyuki¹, Tatsuya Furuki¹, Yamakawa Kouji² (1.Gifu Univ., 2.katagiri engineering)

Keywords:plasma, removal coating, MVP