The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18p-C309-1~13] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Wed. Sep 18, 2019 1:45 PM - 5:15 PM C309 (C309)

Akihisa Ogino(Shizuoka Univ.), Shota Nunomura(AIST)

2:30 PM - 2:45 PM

[18p-C309-4] Comparison between characteristics of twin-cathode and twin-anode torches

〇(B)Kota Kawano1, Hideki Sasaoka1, Muneo Furuse1, Satoshi Sakiyama2 (1.NIT, Oshima college, 2.Yamaguchi Univ.)

Keywords:Plasma spraying, Twin anode plasma torch, Twin cathode plasma torch

The characteristics of the twin cathode plasma torch and twin anode plasma torch, which are high efficiency plasma spray equipment, were evaluated by measuring the temperature and velocity distribution of the sprayed particles. We used a newly designed system to measure temperature and velocity of sprayed particles without the influence of plasma emitting light because the conventional one has large errors in temperature measurements. The comparison shows that the twin cathode torch has advantages in increasing the temperature and the twin anode torch in increasing the speed.