The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[20p-E311-1~17] 15.6 Group IV Compound Semiconductors (SiC)

Fri. Sep 20, 2019 1:30 PM - 6:15 PM E311 (E311)

Hiroshi Yano(Univ. of Tsukuba), Yasunori Tanaka(AIST)

3:30 PM - 3:45 PM

[20p-E311-8] Experimental Study on Short-Channel Effects in Side-Gate SiC JFETs

Masashi Nakajima1, Qimin Jin1, Mitsuaki Kaneko1, Tsunenobu Kimoto1 (1.Kyoto Univ.)

Keywords:JFET, Ion Implantation, Short-Channel Effect