[20p-E314-1~14] 16.3 Bulk, thin-film and other silicon-based solar cells

[20p-E314-6] Deposition of high quality i-a-Si:H film by facing target sputtering and its application to silicon heterojunction solar cell

〇Yuta Shiratori^1,2, Shinsuke Miyajima¹ (1.Tokyo Tech., 2.JSPS research fellow)

Keywords:Silicon hetero-junction solar cells, Facing target sputtering