Hideaki Tanimura

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:15 PM - 3:45 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9p-M114-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM

[9p-M114-3] Highly activated junctions using Flash Lamp Annealing tool with sub-milliseconds shorter pulses

Akitsugu Ueda¹, 〇Hideaki Tanimura¹, Hikaru Kawarazaki¹, Takahiro Yamada¹, Kazuhiko Fuse¹, Takayuki Aoyama¹, Shinichi Kato¹, Yasuhide Nozaki¹ (1.SCREEN Semiconductor Solutions)

2:00 PM - 2:15 PM

[9p-M114-4] Impurity Doping with High Concentration Using Flash Lamp Annealing and Sol-Gel Coating (SGC)

〇Hideaki Tanimura¹, Kazuhiko Fuse¹, Takayuki Aoyama¹, Shinichi Kato¹, Yasuhide Nozaki¹ (1.SCREEN Semiconductor Solutions)

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